Fims foup
WebMoved Permanently. The document has moved here. FOUP is an acronym for Front Opening Unified Pod or Front Opening Universal Pod. FOUPs are a specialized plastic carrier designed to hold silicon wafers securely and safely in a controlled environment, and to allow the wafers to be transferred between machines for processing or measurement. FOUPs began … See more FOSB is an acronym for Front Opening Shipping Box. FOSBs are used for transporting wafers between manufacturing facilities. See more • SMIF See more • 3S Korea • CKplas • Danichi Shoji • Entegris See more
Fims foup
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WebJan 15, 2024 · FOUPs were first conditioned at clean room conditions (21 ± 2 °C, 45 ± 5% RH). A 10-μl NH 3 solution droplet was used at two different concentrations to contaminate the FOUP; similar protocol was used with HF and HCl solutions presented in Table 1 [5, 6].Upon evaporation (door closed), this yields contamination of a few ppmv inside the … WebTDK Product Center
WebAn Equipment Front End Module (EFEM) is the mainstay of semiconductor automation, shuffling silicon wafers between ultra-clean storage carriers and a variety of processing, measurement and testing systems. The robotics and peripheral equipment used in the semiconductor wafer processing environment work with unbelievable precision and … WebJan 6, 2024 · TDK Product Features. The level of cleanliness required for manufacturing processes such as semiconductor facilities and flip chip mounters is ever rising. TDK obtained the particle score which was the world's best ever recorded level in a PWP test. We manufacture and sell the next generation mini-environment systems equipped with the …
WebModel: MW300GT. Wafer Shipping Box. FIMS Door/Automated: Front Opening. Manual Open/Close Function. Designed To Minimize Cleaning And Drying Cycle Time. Conforms To SEMI Standard M31. Dimensions: 389 mm X 340 mm X 331 mm. Weight: 7.5 kg (16.9 lb) With 25 Wafers, 4.3kg (9.7lb) Without Wafers. Individual Parts: WebY-axis(FOUP forward and back motion) ±0.1mm FOUP open operation;10sec. FOUP close operation;10sec. 300mm FOUP(SEMI E47.1,E62 compliant product) Suitable Product Specifications Presence of FOUP FOUP normal of position Prevents hand front being caught FOUP docking Wafer flying out FOUP Door detection Y-axis(FOUP forward and …
WebMar 11, 2014 · Y-axis (FOUP: Forward/Retract): 70mm (SEMI Standard) Z-axis (FOUP door up/down): 375mm. 3.7 Repetition Precision. Y-axis (FOUP: Forward/Retract): ±0.1mm. Z …
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